241108-K3-1

Type: Synthesis

ObjectId: 22539

Created: 11/8/2024 9:38:47 AM by C04) Patrick Marx [patrick.marx-l69@rub.de]

Access: Public Sort Code (asc): 0

Description:

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  • 10671 241108-K3-1
    Sample

    La-Co-V-O hot deposition 500°C on Si/SIO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240731-K7-1), La2O3: RF, 200W, 20W/min ramp, Ni: 70W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h

All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
String chamber K3 K<i> (for example, "K7")
String operator Patrick Marx
Float start vacuum 9e-008 Torr
Float process duration 2880 s
Float substrate temperature 500 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float substrate position 0 °
Float process pressure 3 mTorr
Float flow PG 80 sccm
Float heating temperature 500 °C
Float preheat duration 60 min
target source configuration
Cathode 1
String target material Co
String target ID #10
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float set power cathode 1 70 W
Float act power cathode 1 70 W
Float voltage cathode 1 343 V
Float current cathode 1 0.205 A
Cathode 2
String target material Ni
String target ID #13
Mag2-Pulsed DC
Float ignition power cathode 2 70 W
Float pre clean power 2 70 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 70 W
Float set power cathode 2 70 W
Float act power cathode 2 70 W
Float voltage cathode 2 113 V
Float current cathode 2 0.62 A
Float frequency cathode 2 350000 Hz
Float pulse length cathode 2 1.4 µs
Cathode 3
String target material La2O3
String target ID #1
Mag3-RF
Float ignition power cathode 3 200 W
Float ramp power step cathode 3 20 W
Float duration per step cathode 3 60 s
Float pre clean power 3 200 W
Float pre clean time 3 600 s
Float pre clean pressure cathode 3 20 mTorr
Float set power forward cathode 3 200 W
Float act power forward cathode 3 198 W
Float power reflected cathode 3 0 W
Float voltage cathode 3 0 V
Float load cathode 3 32 %
Float tune cathode 3 27 %

The table

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