3837 synthesis (co deposition, 180929-K3-2, id=33100)

Type: Synthesis

ObjectId: 15065 ExternalId: 33100

Created: 11/11/2023 10:54:14 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 3837 (co deposition, 180929-K3-2, K7, Fe-Co-O continuous composition spread; Pt-Electrode)

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Type Name Value Comment
general process parameters
Float start vacuum 0.0002 Torr
Float process duration 25200 s
Float substrate temperature 25 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 10 sccm
Float table height 25 mm
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 2
String target material Co
Mag2-DC
Float ignition power cathode 2 100 W
Float pre clean power 2 100 W
Float pre clean time 2 300 s
Float power cathode 2 97 W
Float voltage cathode 2 273 V
Float current cathode 2 0.35 A
Cathode 4
String target material Fe
Mag4-RF
Float ignition power cathode 4 100 W
Float pre clean power 4 100 W
Float pre clean time 4 300 s
Float power forward cathode 4 98 W
Float power reflected cathode 4 0 W
Float voltage cathode 4 190 V

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