3837 synthesis (single material, 180929-K3-1, id=33111)

Type: Synthesis show more

ObjectId: 15064 ExternalId: 33111

Created: 11/11/2023 10:54:14 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 3837 (single material, 180929-K3-1, K7, Fe-Co-O continuous composition spread; Pt-Electrode)

[no file attached]

No associated objects found.

3837 Fe-Co-O continuous composition spreads Fe-Co-O
Sample
Sample for Fe-Co-O continuous composition spreads (Fe-Co-O at Si + SiO2, ID=0003837, K3) by Piotrowiak Tobias. Pt-Elektrodenlayer. Fe-Target leicht durchgesputtert.

Type	Name	Value	Comment
general process parameters
Float	start vacuum	0.0002	Torr
Float	process duration	260	s
Float	substrate temperature	25	°C
String	process gas	Ar
Float	table height	25	mm
Float	process pressure	1	mTorr
Float	flow PG	60	sccm
target source configuration
Cathode 1
String	target material	Ti
Mag1-DC
Float	pre clean power 1	200	W
Float	pre clean time 1	300	s
Float	power cathode 1	100	W
Float	voltage cathode 1	275	V
Float	current cathode 1	0.36	A
Cathode 3
String	target material	Pt
Mag3-DC
Float	power cathode 3	91	W
Float	voltage cathode 3	330	V
Float	current cathode 3	0.28	A

No properties for rendering in a table found