4134 synthesis (adhesion layer, 190129-K3-2, id=36827)

Type: Synthesis

ObjectId: 15160 ExternalId: 36827

Created: 11/11/2023 10:56:35 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 4134 (adhesion layer, 190129-K3-2, K7, Fe-Co-O Continuous Composition Spread; Pt-Electrode (Ta-Adhesionlayer) Roomtemperature)

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Type Name Value Comment
general process parameters
Float start vacuum 0.0002 Torr
Float process duration 270 s
Float substrate temperature 25 °C
Float substrate rotation 26 RPM
String process gas Ar
Float table height 25 mm
Float process pressure 1 mTorr
Float flow PG 40 sccm
target source configuration
Cathode 1
String target material Ta
Mag1-DC
Float ignition power cathode 1 60 W
Float pre clean power 1 100 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 10 mTorr
Float power cathode 1 94 W
Float voltage cathode 1 268 V
Float current cathode 1 0.353 A
substrate bias
RF substrate bias
Float bias power forward 30 W
Float bias power reflected 0 W

The table

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