4134 synthesis (single material, 190129-K3-2, id=36828)

Type: Synthesis

ObjectId: 15161 ExternalId: 36828

Created: 11/11/2023 10:56:35 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 4134 (single material, 190129-K3-2, K7, Fe-Co-O Continuous Composition Spread; Pt-Electrode (Ta-Adhesionlayer) Roomtemperature)

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Type Name Value Comment
general process parameters
Float start vacuum 0.0002 Torr
Float process duration 270 s
Float substrate temperature 25 °C
Float substrate rotation 26 RPM
String process gas Ar
Float table height 25 mm
Float process pressure 1 mTorr
Float flow PG 40 sccm
target source configuration
Cathode 3
String target material Pt
Mag3-DC
Float ignition power cathode 3 60 W
Float pre clean power 3 100 W
Float pre clean time 3 180 s
Float pre clean pressure cathode 3 10 mTorr
Float power cathode 3 91 W
Float voltage cathode 3 342 V
Float current cathode 3 0.268 A

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