4454 synthesis (single material, 190902-K3-3, id=41285)

Type: Synthesis

ObjectId: 15208 ExternalId: 41285

Created: 11/11/2023 10:59:01 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 4454 (single material, 190902-K3-3, K7, Fe-Co-O Continuous Composition Spread; Pt Electrode (Ta Adhesion) Hot Deposition 300 °C)

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Type Name Value Comment
general process parameters
Float process duration 270 s
Float substrate temperature 22 °C
Float substrate rotation 26 RPM
String process gas Ar
Float table height 25 mm
Float process pressure 1 mTorr
Float flow PG 40 sccm
target source configuration
Cathode 3
String target material Pt
Mag3-Pulsed DC
Float ignition power cathode 3 120 W
Float pre clean power 3 100 W
Float power cathode 3 99 W

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