4472 synthesis (co deposition, 190910-K3-1, id=41359)

Type: Synthesis

ObjectId: 15217 ExternalId: 41359

Created: 11/11/2023 10:59:09 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 4472 (co deposition, 190910-K3-1, K7, Fe-Co-O Continuous Composition Spread; Pt Electrode (Ta Adhesion) Hot Deposition 700 °C)

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Type Name Value Comment
general process parameters
Float start vacuum 5e-005 Torr
Float process duration 3600 s
Float substrate temperature 700 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 2
String target material Co
Mag2-DC
Float ignition power cathode 2 100 W
Float pre clean power 2 100 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 123 W
Float voltage cathode 2 380 V
Float current cathode 2 0.32 A
Cathode 4
String target material Fe
Mag4-RF
Float ignition power cathode 4 50 W
Float pre clean power 4 100 W
Float pre clean time 4 60 s
Float pre clean pressure cathode 4 20 mTorr
Float power forward cathode 4 298 W
Float power reflected cathode 4 1 W
Float voltage cathode 4 262 V

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