_Template

Type: Synthesis

ObjectId: 30209

Created: 7/17/2023 7:46:47 PM by INF) Victor Dudarev [vic.dudarev@gmail.com]

Updated: 11/13/2024 8:39:35 PM by INF) Victor Dudarev [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: DO NOT MODIFY! Synthesis Template. This is a core template to adjust synthesis properties for sputtering samples.

[no file attached]

Associated Objects

No associated objects found.

All properties (except table), that define a template

Type Name Value Comment
Int Main4Printing -1 Set it up to 1 for the main synthesis document for printing
chamber configuration
K1
Float loops -1
Float A1 shutter position -1 mm
Float A1 shutter velocity -1 mm/s
Float A2 shutter position -1 mm
Float A2 shutter velocity -1 mm/s
Float B1 shutter position -1 mm
Float B1 shutter velocity -1 mm/s
Float B2 shutter position -1 mm
Float B2 shutter velocity -1 mm/s
general process parameters
String chamber -1 K<i> (for example, "K7")
Int problem occured? -1 1 - Yes, 0 - No
String problem description -1
String operator -1
String assistant -1
Float start vacuum -1 Torr
Float process duration -1 s
Float substrate temperature -1 °C
Float substrate rotation -1 RPM
String process gas -1
String reactive gas 1 -1
Float flow RG 1 -1 sccm
Float flow RG 2 -1 sccm
String reactive gas 2 -1
Float table height -1 mm
Float cathode tilt -1 mm
Float substrate position -1 °
Float process pressure -1 mTorr
Float flow PG -1 sccm
Float end vacuum -1 Torr
Float preheat duration -1 min
target source configuration
Cathode 1
String target material -1
String target ID -1
String aperture -1
Mag1-DC
Float ignition power cathode 1 -1 W
Float ramp power step cathode 1 -1 W
Float duration per step cathode 1 -1 s
Float ramp duration 1 -1 s
Float pre clean power 1 -1 W
Float pre clean time 1 -1 s
String pre clean pressure cathode 1 -1 mTorr
Float power cathode 1 -1 W
Float set power cathode 1 -1 W
Float act power cathode 1 -1 W
Float voltage cathode 1 -1 V
Float current cathode 1 -1 A
Float deposition rate 1 -1 nm/s
Mag1-HiPIMS
String mode cathode 1 -1
Float ignition power cathode 1 -1 W
Float ramp power step cathode 1 -1 W
Float duration per step cathode 1 -1 s
Float ramp duration 1 -1 s
Float pre clean power 1 -1 W
Float pre clean time 1 -1 s
String pre clean pressure cathode 1 -1 mTorr
Float power cathode 1 -1 W
Float set power cathode 1 -1 W
Float act power cathode 1 -1 W
Float voltage cathode 1 -1 V
Float current cathode 1 -1 A
Float frequency cathode 1 -1 Hz
Float pulse length cathode 1 -1 µs
Float duty cycle cathode 1 -1 %
Float peak power cathode 1 -1 W
Float peak power density cathode 1 -1 W/cm^2
Float peak current cathode 1 -1 A
Float deposition rate 1 -1 nm/s
Mag1-Pulsed DC
Float ignition power cathode 1 -1 W
Float ramp power step cathode 1 -1 W
Float duration per step cathode 1 -1 s
Float ramp duration 1 -1 s
Float pre clean power 1 -1 W
Float pre clean time 1 -1 s
String pre clean pressure cathode 1 -1 mTorr
Float power cathode 1 -1 W
Float set power cathode 1 -1 W
Float act power cathode 1 -1 W
Float voltage cathode 1 -1 V
Float current cathode 1 -1 A
Float frequency cathode 1 -1 Hz
Float pulse length cathode 1 -1 µs
Float duty cycle cathode 1 -1 %
Float deposition rate 1 -1 nm/s
Mag1-RF
Float ignition power cathode 1 -1 W
Float ramp power step cathode 1 -1 W
Float duration per step cathode 1 -1 s
Float ramp duration 1 -1 s
Float pre clean power 1 -1 W
Float pre clean time 1 -1 s
String pre clean pressure cathode 1 -1 mTorr
Float power forward cathode 1 -1 W
Float set power forward cathode 1 -1 W
Float act power forward cathode 1 -1 W
Float power reflected cathode 1 -1 W
Float voltage cathode 1 -1 V
Float load cathode 1 -1 %
Float tune cathode 1 -1 %
Float deposition rate 1 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
Cathode 2
String target material -1
String target ID -1
String aperture -1
Mag2-DC
Float ignition power cathode 2 -1 W
Float ramp power step cathode 2 -1 W
Float duration per step cathode 2 -1 s
Float ramp duration 2 -1 s
Float pre clean power 2 -1 W
Float pre clean time 2 -1 s
Float pre clean pressure cathode 2 -1 mTorr
Float power cathode 2 -1 W
Float set power cathode 2 -1 W
Float act power cathode 2 -1 W
Float voltage cathode 2 -1 V
Float current cathode 2 -1 A
Float deposition rate 2 -1 nm/s
Mag2-HiPIMS
String mode cathode 2 -1
Float ignition power cathode 2 -1 W
Float ramp power step cathode 2 -1 W
Float duration per step cathode 2 -1 s
Float ramp duration 2 -1 s
Float pre clean power 2 -1 W
Float pre clean time 2 -1 s
Float pre clean pressure cathode 2 -1 mTorr
Float power cathode 2 -1 W
Float set power cathode 2 -1 W
Float act power cathode 2 -1 W
Float voltage cathode 2 -1 V
Float current cathode 2 -1 A
Float frequency cathode 2 -1 Hz
Float pulse length cathode 2 -1 µs
Float duty cycle cathode 2 -1 %
Float peak power cathode 2 -1 W
Float peak power density cathode 2 -1 W/cm^2
Float peak current cathode 2 -1 A
Float deposition rate 2 -1 nm/s
Mag2-Pulsed DC
Float ignition power cathode 2 -1 W
Float ramp power step cathode 2 -1 W
Float duration per step cathode 2 -1 s
Float ramp duration 2 -1 s
Float pre clean power 2 -1 W
Float pre clean time 2 -1 s
Float pre clean pressure cathode 2 -1 mTorr
Float power cathode 2 -1 W
Float set power cathode 2 -1 W
Float act power cathode 2 -1 W
Float voltage cathode 2 -1 V
Float current cathode 2 -1 A
Float frequency cathode 2 -1 Hz
Float pulse length cathode 2 -1 µs
Float duty cycle cathode 2 -1 %
Float deposition rate 2 -1 nm/s
Mag2-RF
Float ignition power cathode 2 -1 W
Float ramp power step cathode 2 -1 W
Float duration per step cathode 2 -1 s
Float ramp duration 2 -1 s
Float pre clean power 2 -1 W
Float pre clean time 2 -1 s
Float pre clean pressure cathode 2 -1 mTorr
Float power forward cathode 2 -1 W
Float set power forward cathode 2 -1 W
Float act power forward cathode 2 -1 W
Float power reflected cathode 2 -1 W
Float voltage cathode 2 -1 V
Float load cathode 2 -1 %
Float tune cathode 2 -1 %
Float deposition rate 2 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
Cathode 3
String target material -1
String target ID -1
String aperture -1
Mag3-DC
Float ignition power cathode 3 -1 W
Float ramp power step cathode 3 -1 W
Float duration per step cathode 3 -1 s
Float ramp duration 3 -1 s
Float pre clean power 3 -1 W
Float pre clean time 3 -1 s
Float pre clean pressure cathode 3 -1 mTorr
Float power cathode 3 -1 W
Float set power cathode 3 -1 W
Float act power cathode 3 -1 W
Float voltage cathode 3 -1 V
Float current cathode 3 -1 A
Float deposition rate 3 -1 nm/s
Mag3-HiPIMS
String mode cathode 3 -1
Float ignition power cathode 3 -1 W
Float ramp power step cathode 3 -1 W
Float duration per step cathode 3 -1 s
Float ramp duration 3 -1 s
Float pre clean power 3 -1 W
Float pre clean time 3 -1 s
Float pre clean pressure cathode 3 -1 mTorr
Float power cathode 3 -1 W
Float set power cathode 3 -1 W
Float act power cathode 3 -1 W
Float voltage cathode 3 -1 V
Float current cathode 3 -1 A
Float frequency cathode 3 -1 Hz
Float pulse length cathode 3 -1 µs
Float duty cycle cathode 3 -1 %
Float peak power cathode 3 -1 W
Float peak power density cathode 3 -1 W/cm^2
Float peak current cathode 3 -1 A
Float deposition rate 3 -1 nm/s
Mag3-Pulsed DC
Float ignition power cathode 3 -1 W
Float ramp power step cathode 3 -1 W
Float duration per step cathode 3 -1 s
Float ramp duration 3 -1 s
Float pre clean power 3 -1 W
Float pre clean time 3 -1 s
Float pre clean pressure cathode 3 -1 mTorr
Float power cathode 3 -1 W
Float set power cathode 3 -1 W
Float act power cathode 3 -1 W
Float voltage cathode 3 -1 V
Float current cathode 3 -1 A
Float frequency cathode 3 -1 Hz
Float pulse length cathode 3 -1 µs
Float duty cycle cathode 3 -1 %
Float deposition rate 3 -1 nm/s
Mag3-RF
Float ignition power cathode 3 -1 W
Float ramp power step cathode 3 -1 W
Float duration per step cathode 3 -1 s
Float ramp duration 3 -1 s
Float pre clean power 3 -1 W
Float pre clean time 3 -1 s
Float pre clean pressure cathode 3 -1 mTorr
Float power forward cathode 3 -1 W
Float set power forward cathode 3 -1 W
Float act power forward cathode 3 -1 W
Float power reflected cathode 3 -1 W
Float voltage cathode 3 -1 V
Float load cathode 3 -1 %
Float tune cathode 3 -1 %
Float deposition rate 3 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
Cathode 4
String target material -1
String target ID -1
String aperture -1
Mag4-DC
Float ignition power cathode 4 -1 W
Float ramp power step cathode 4 -1 W
Float duration per step cathode 4 -1 s
Float ramp duration 4 -1 s
Float pre clean power 4 -1 W
Float pre clean time 4 -1 s
Float pre clean pressure cathode 4 -1 mTorr
Float power cathode 4 -1 W
Float set power cathode 4 -1 W
Float act power cathode 4 -1 W
Float voltage cathode 4 -1 V
Float current cathode 4 -1 A
Float deposition rate 4 -1 nm/s
Mag4-HiPIMS
String mode cathode 4 -1
Float ignition power cathode 4 -1 W
Float ramp power step cathode 4 -1 W
Float duration per step cathode 4 -1 s
Float ramp duration 4 -1 s
Float pre clean power 4 -1 W
Float pre clean time 4 -1 s
Float pre clean pressure cathode 4 -1 mTorr
Float power -1 W
Float power cathode 4 -1 W
Float set power cathode 4 -1 W
Float act power cathode 4 -1 W
Float voltage cathode 4 -1 V
Float current cathode 4 -1 A
Float frequency cathode 4 -1 Hz
Float pulse length cathode 4 -1 µs
Float duty cycle cathode 4 -1 %
Float peak power cathode 4 -1 W
Float peak power density cathode 4 -1 W/cm^2
Float peak current cathode 4 -1 A
Float deposition rate 4 -1 nm/s
Mag4-Pulsed DC
Float ignition power cathode 4 -1 W
Float ramp power step cathode 4 -1 W
Float duration per step cathode 4 -1 s
Float ramp duration 4 -1 s
Float pre clean power 4 -1 W
Float pre clean time 4 -1 s
Float pre clean pressure cathode 4 -1 mTorr
Float power cathode 4 -1 W
Float set power cathode 4 -1 W
Float act power cathode 4 -1 W
Float voltage cathode 4 -1 V
Float current cathode 4 -1 A
Float frequency cathode 4 -1 Hz
Float pulse length cathode 4 -1 µs
Float duty cycle cathode 4 -1 %
Float deposition rate 4 -1 nm/s
Mag4-RF
Float ignition power cathode 4 -1 W
Float ramp power step cathode 5 -1 W
Float duration per step cathode 4 -1 s
Float ramp duration 4 -1 s
Float pre clean power 4 -1 W
Float pre clean time 4 -1 s
Float pre clean pressure cathode 4 -1 mTorr
Float power forward cathode 4 -1 W
Float set power forward cathode 4 -1 W
Float act power forward cathode 4 -1 W
Float power reflected cathode 4 -1 W
Float voltage cathode 4 -1 V
Float load cathode 4 -1 %
Float tune cathode 4 -1 %
Float deposition rate 4 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
Cathode 5
String target material -1
String target ID -1
String aperture -1
Mag5-DC
Float ignition power cathode 5 -1 W
Float ramp power step cathode 5 -1 W
Float duration per step cathode 5 -1 s
Float ramp duration 5 -1 s
Float pre clean power 5 -1 W
Float pre clean time 5 -1 s
Float pre clean pressure cathode 5 -1 mTorr
Float power cathode 5 -1 W
Float set power cathode 5 -1 W
Float act power cathode 5 -1 W
Float voltage cathode 5 -1 V
Float current cathode 5 -1 A
Float deposition rate 5 -1 nm/s
Mag5-HiPIMS
String mode cathode 5 -1
Float ignition power cathode 5 -1 W
Float ramp power step cathode 5 -1 W
Float duration per step cathode 5 -1 s
Float ramp duration 5 -1 s
Float pre clean power 5 -1 W
Float pre clean time 5 -1 s
Float pre clean pressure cathode 5 -1 mTorr
Float power cathode 5 -1 W
Float set power cathode 5 -1 W
Float act power cathode 5 -1 W
Float voltage cathode 5 -1 V
Float current cathode 5 -1 A
Float frequency cathode 5 -1 Hz
Float pulse length cathode 5 -1 µs
Float duty cycle cathode 5 -1 %
Float peak power cathode 5 -1 W
Float peak power density cathode 5 -1 W/cm^2
Float peak current cathode 5 -1 A
Float deposition rate 5 -1 nm/s
Mag5-Pulsed DC
Float ignition power cathode 5 -1 W
Float ramp power step cathode 5 -1 W
Float duration per step cathode 5 -1 s
Float ramp duration 5 -1 s
Float pre clean power 5 -1 W
Float pre clean time 5 -1 s
Float pre clean pressure cathode 5 -1 mTorr
Float power cathode 5 -1 W
Float set power cathode 5 -1 W
Float act power cathode 5 -1 W
Float voltage cathode 5 -1 V
Float current cathode 5 -1 A
Float frequency cathode 5 -1 Hz
Float pulse length cathode 5 -1 µs
Float duty cycle cathode 5 -1 %
Float deposition rate 5 -1 nm/s
Mag5-RF
Float ignition power cathode 5 -1 W
Float ramp power step cathode 5 -1 W
Float duration per step cathode 5 -1 s
Float ramp duration 5 -1 s
Float pre clean power 5 -1 W
Float pre clean time 5 -1 s
Float pre clean pressure cathode 5 -1 mTorr
Float power forward cathode 5 -1 W
Float set power forward cathode 5 -1 W
Float act power forward cathode 5 -1 W
Float power reflected cathode 5 -1 W
Float voltage cathode 5 -1 V
Float load cathode 5 -1 %
Float tune cathode 5 -1 %
Float deposition rate 5 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
Cathode 6
String target material -1
String target ID -1
String aperture -1
Mag6-DC
Float ignition power cathode 6 -1 W
Float ramp power step cathode 6 -1 W
Float duration per step cathode 6 -1 s
Float ramp duration 6 -1 s
Float pre clean power 6 -1 W
Float pre clean time 6 -1 s
Float pre clean pressure cathode 6 -1 mTorr
Float power cathode 6 -1 W
Float set power cathode 6 -1 W
Float act power cathode 6 -1 W
Float voltage cathode 6 -1 V
Float current cathode 6 -1 A
Float deposition rate 6 -1 nm/s
Mag6-HiPIMS
String mode cathode 6 -1
Float ignition power cathode 6 -1 W
Float ramp power step cathode 6 -1 W
Float duration per step cathode 6 -1 s
Float ramp duration 6 -1 s
Float pre clean power 6 -1 W
Float pre clean time 6 -1 s
Float pre clean pressure cathode 6 -1 mTorr
Float power cathode 6 -1 W
Float set power cathode 6 -1 W
Float act power cathode 6 -1 W
Float voltage cathode 6 -1 V
Float current cathode 6 -1 A
Float frequency cathode 6 -1 Hz
Float pulse length cathode 6 -1 µs
Float duty cycle cathode 6 -1 %
Float peak power cathode 6 -1 W
Float peak power density cathode 6 -1 W/cm^2
Float peak current cathode 6 -1 A
Float deposition rate 6 -1 nm/s
Mag6-Pulsed DC
Float ignition power cathode 6 -1 W
Float ramp power step cathode 6 -1 W
Float duration per step cathode 6 -1 s
Float ramp duration 6 -1 s
Float pre clean power 6 -1 W
Float pre clean time 6 -1 s
Float pre clean pressure cathode 6 -1 mTorr
Float power cathode 6 -1 W
Float set power cathode 6 -1 W
Float act power cathode 6 -1 W
Float voltage cathode 6 -1 V
Float current cathode 6 -1 A
Float frequency cathode 6 -1 Hz
Float pulse length cathode 6 -1 µs
Float duty cycle cathode 6 -1 %
Float deposition rate 6 -1 nm/s
Mag6-RF
Float ignition power cathode 6 -1 W
Float ramp power step cathode 6 -1 W
Float duration per step cathode 6 -1 s
Float ramp duration 6 -1 s
Float pre clean power 6 -1 W
Float pre clean time 6 -1 s
Float pre clean pressure cathode 6 -1 mTorr
Float power forward cathode 6 -1 W
Float set power forward cathode 6 -1 W
Float act power forward cathode 6 -1 W
Float power reflected cathode 6 -1 W
Float voltage cathode 6 -1 V
Float load cathode 6 -1 %
Float tune cathode 6 -1 %
Float deposition rate 6 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
Cathode 7
String target material -1
String target ID -1
String aperture -1
Mag7-DC
Float ignition power cathode 7 -1 W
Float ramp power step cathode 7 -1 W
Float duration per step cathode 7 -1 s
Float ramp duration 7 -1 s
Float pre clean power 7 -1 W
Float pre clean time 7 -1 s
Float pre clean pressure cathode 7 -1 mTorr
Float power cathode 7 -1 W
Float set power cathode 7 -1 W
Float act power cathode 7 -1 W
Float voltage cathode 7 -1 V
Float current cathode 7 -1 A
Float deposition rate 7 -1 nm/s
Mag7-HiPIMS
String mode cathode 7 -1
Float ignition power cathode 7 -1 W
Float ramp power step cathode 7 -1 W
Float duration per step cathode 7 -1 s
Float ramp duration 7 -1 s
Float pre clean power 7 -1 W
Float pre clean time 7 -1 s
Float pre clean pressure cathode 7 -1 mTorr
Float power cathode 7 -1 W
Float set power cathode 7 -1 W
Float act power cathode 7 -1 W
Float voltage cathode 7 -1 V
Float current cathode 7 -1 A
Float frequency cathode 7 -1 Hz
Float pulse length cathode 7 -1 µs
Float duty cycle cathode 7 -1 %
Float peak power cathode 7 -1 W
Float peak power density cathode 7 -1 W/cm^2
Float peak current cathode 7 -1 A
Float deposition rate 7 -1 nm/s
Mag7-Pulsed DC
Float ignition power cathode 7 -1 W
Float ramp power step cathode 7 -1 W
Float duration per step cathode 7 -1 s
Float ramp duration 7 -1 s
Float pre clean power 7 -1 W
Float pre clean time 7 -1 s
Float pre clean pressure cathode 7 -1 mTorr
Float power cathode 7 -1 W
Float set power cathode 7 -1 W
Float act power cathode 7 -1 W
Float voltage cathode 7 -1 V
Float current cathode 7 -1 A
Float frequency cathode 7 -1 Hz
Float pulse length cathode 7 -1 µs
Float duty cycle cathode 7 -1 %
Float deposition rate 7 -1 nm/s
Mag7-RF
Float ignition power cathode 7 -1 W
Float ramp power step cathode 7 -1 W
Float duration per step cathode 7 -1 s
Float ramp duration 7 -1 s
Float pre clean power 7 -1 W
Float pre clean time 7 -1 s
Float pre clean pressure cathode 7 -1 mTorr
Float power forward cathode 7 -1 W
Float set power forward cathode 7 -1 W
Float act power forward cathode 7 -1 W
Float power reflected cathode 7 -1 W
Float voltage cathode 7 -1 V
Float load cathode 7 -1 %
Float tune cathode 7 -1 %
Float deposition rate 7 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
Cathode 8
String target material -1
String target ID -1
String aperture -1
Mag8-DC
Float ignition power cathode 8 -1 W
Float ramp power step cathode 8 -1 W
Float duration per step cathode 8 -1 s
Float ramp duration 8 -1 s
Float pre clean power 8 -1 W
Float pre clean time 8 -1 s
Float pre clean pressure cathode 8 -1 mTorr
Float power cathode 8 -1 W
Float set power cathode 8 -1 W
Float act power cathode 8 -1 W
Float voltage cathode 8 -1 V
Float current cathode 8 -1 A
Float deposition rate 8 -1 nm/s
Mag8-HiPIMS
String mode cathode 8 -1
Float ignition power cathode 8 -1 W
Float ramp power step cathode 8 -1 W
Float duration per step cathode 8 -1 s
Float ramp duration 8 -1 s
Float pre clean power 8 -1 W
Float pre clean time 8 -1 s
Float pre clean pressure cathode 8 -1 mTorr
Float power cathode 8 -1 W
Float set power cathode 8 -1 W
Float act power cathode 8 -1 W
Float voltage cathode 8 -1 V
Float current cathode 8 -1 A
Float frequency cathode 8 -1 Hz
Float pulse length cathode 8 -1 µs
Float duty cycle cathode 8 -1 %
Float peak power cathode 8 -1 W
Float peak power density cathode 8 -1 W/cm^2
Float peak current cathode 8 -1 A
Float deposition rate 8 -1 nm/s
Mag8-Pulsed DC
Float ignition power cathode 8 -1 W
Float ramp power step cathode 8 -1 W
Float duration per step cathode 8 -1 s
Float ramp duration 8 -1 s
Float pre clean power 8 -1 W
Float pre clean time 8 -1 s
Float pre clean pressure cathode 8 -1 mTorr
Float power cathode 8 -1 W
Float set power cathode 8 -1 W
Float act power cathode 8 -1 W
Float voltage cathode 8 -1 V
Float current cathode 8 -1 A
Float frequency cathode 8 -1 Hz
Float pulse length cathode 8 -1 µs
Float duty cycle cathode 8 -1 %
Float deposition rate 8 -1 nm/s
Mag8-RF
Float ignition power cathode 8 -1 W
Float ramp power step cathode 8 -1 W
Float duration per step cathode 8 -1 s
Float ramp duration 8 -1 s
Float pre clean power 8 -1 W
Float pre clean time 8 -1 s
Float pre clean pressure cathode 8 -1 mTorr
Float power forward cathode 8 -1 W
Float set power forward cathode 8 -1 W
Float act power forward cathode 8 -1 W
Float power reflected cathode 8 -1 W
Float voltage cathode 8 -1 V
Float load cathode 8 -1 %
Float tune cathode 8 -1 %
Float deposition rate 8 -1 nm/s
plasma emission monitor
Float time 2 s
Float gain 2 %
Float voltage 2 V
Float set point 2 %
Float time set point 2 s
Float O2 flow lower bound 2 sccm
Float O2 flow upper bound 2 sccm
GLAD
String target material -1
String target ID -1
String aperture -1
GLAD DC
Float Glancing angle -1 °
Float ignition power GLAD cathode -1 W
Float duration per step GLAD cathode -1 s
Float ramp duration GLAD cathode -1 s
Float pre clean power glad -1 W
Float pre clean time glad -1 s
Float power GLAD -1 W
Float voltage GLAD -1 V
Float current GLAD -1 A
substrate bias
DC substrate bias
Float bias power -1 W
Float bias voltage -1 V
Float bias current -1 A
HiPIMS substrate bias
Float bias power -1 W
Float bias voltage -1 V
Float bias current -1 A
Float bias frequency -1 Hz
Float bias pulse length -1 µs
RF substrate bias
Float bias power forward -1 W
Float bias power reflected -1 W
Float bias voltage -1 V
Float bias load -1 %
Float bias tune -1 %
Thermal Evaporator
String evaporator material -1
String evaporator target ID -1
Float evaporator temperature -1 °C
Float evaporator voltage -1 V
String evaporator current -1 A
annealing process parameters
Float start temperature 2 °C
Float end temperature 2 °C
String process gas 2 formula
Float process gas flow 2 sccm
Float duration 2 s
Float ramp up speed 2 K/min
Float ramp down speed 2 K/min
Float start pressure 2 Pa
Float max pressure 2 Pa
Float set temperature -1 °C
String reactive gas -1
Float reactive gas flow -1 sccm

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