4116 synthesis (single material, 190116-K3-2, id=36589)

Type: Synthesis show more

ObjectId: 15113 ExternalId: 36589

Created: 11/11/2023 10:56:25 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 4116 (single material, 190116-K3-2, K7, Fe-Co-O Continuous Composition Spread; Pt-Electrode (Ta-Adhesionlayer))

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4122 Fe-Co-O continuous composition spreads Fe-Co-O
Sample
Sample for Fe-Co-O continuous composition spreads (Fe-Co-O at Si + SiO2, ID=0004122) by Piotrowiak Tobias. Hot Deposition 3H at 700 °C; 80 sccm Ar; 40 sccm O2 10 min preheated at 700 °C before Deposition
4123 Fe-Co-O continuous composition spreads Fe-Co-O
Sample
Sample for Fe-Co-O continuous composition spreads (Fe-Co-O at Si + SiO2, ID=0004123) by Piotrowiak Tobias. Hot Deposition 3H at 700 °C; 80 sccm Ar; 40 sccm O2 10 min preheated at 700 °C before Deposition

Type	Name	Value	Comment
general process parameters
Float	start vacuum	0.0004	Torr
Float	process duration	270	s
Float	substrate temperature	25	°C
Float	substrate rotation	26	RPM
String	process gas	Ar
Float	table height	25	mm
Float	process pressure	1	mTorr
Float	flow PG	40	sccm
target source configuration
Cathode 3
String	target material	Pt
Mag3-DC
Float	ignition power cathode 3	60	W
Float	pre clean power 3	100	W
Float	pre clean time 3	300	s
Float	pre clean pressure cathode 3	10	mTorr
Float	power cathode 3	98	W
Float	voltage cathode 3	288	V
Float	current cathode 3	0.344	A

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