4122 synthesis (co deposition, 190123-K3-1, id=36669)

Type: Synthesis

ObjectId: 15142 ExternalId: 36669

Created: 11/11/2023 10:56:28 PM by C04) Tobias Piotrowiak [tobias.piotrowiak@rub.de]

Access: Public Sort Code (asc): 0

Description: Synthesis for Sample 4122 (co deposition, 190123-K3-1, K7, Fe-Co-O Continuous Composition Spread; Pt Electrode (Ta Adhesion) Hot Deposition 700 °C)

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All properties (except table)

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Type Name Value Comment
general process parameters
Float start vacuum 0.003 Torr
Float process duration 10800 s
Float substrate temperature 700 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 2
String target material Co
Mag2-DC
Float ignition power cathode 2 50 W
Float pre clean power 2 99 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 10 mTorr
Float power cathode 2 122 W
Float voltage cathode 2 346 V
Float current cathode 2 0.356 A
Cathode 4
String target material Fe
Mag4-RF
Float ignition power cathode 4 50 W
Float pre clean power 4 98 W
Float pre clean time 4 300 s
Float pre clean pressure cathode 4 10 mTorr
Float power forward cathode 4 298 W
Float power reflected cathode 4 3 W
Float voltage cathode 4 286 V

The table

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